More than 8 biochip reader stations
|AJA UHV Deposition Chamber||
AJA UHV sputtering chamber with 8 targets and load lock for sample tansfers. It can accommodate substrates ranging from pieces to 8" diameter
|Cluster UHV Deposition System||
“Cluster” UHV system for in situ vacuum deposition of a variety of films from targets comprised of a dozen different materials, with thickness control to the 0.1 nanometer level (Figure 4). Novel composite materials can be formed by co-deposition from multiple targets or in the presence of a reactive gas, thus presenting a vast range of combinatorial possibilities.
Noncontact robotic spotter for biochip fabrication
|Ion Milling System||
Ion milling with 7" RF Source, a powerful tool for selectively removing a broad range of materials patterned substrates.
|Obducat Nanoimprint System||
Obducat nanoimprint system, which has demonstrated production of dense templates with features down to 30 nm lateral dimensions.
Kerr microscope made by Evico for magnetic domain imaging and local M-H loops.
|Perkin Elmer 4400 Deposition System||
Perkin Elmer 4400 Deposition System (4 targets), Ion Tech Deposition System (1 target, dual beam), and a UHV chamber with 4 ion beam targets and 3 DC magnetron targets.